Edge-Defined Film-Fed Growth (EFG) Sapphire crystal growth Furnace - SKY Technology Development Co., Ltd,
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Edge-Defined Film-Fed Growth (EFG) Sapphire crystal growth Furnace
编号:SN20151119113329652
类别:Edge Defined Film-Fed Growth (EDG) Sapphire Crystalline Furnace
  • 产品概述
  • 规格参数
  • 服务支持

    产品优势:Product Advantage

    1、  生长速度快,周期短(2-3/炉),成本低,易于稳定量产。

    High growing speed, short growing cycle (2-3 days), low cost, suitable for steady volume production.

    2、  成熟的设备制造技术和长晶工艺,且长晶工艺灵活,可根据客户需要调整。

    Mature technology of equipment manufacturing and crystal growing process, and our flexible crystal growing process can be adjusted according to the client’s requirements.

    3、  可多片同步生长,同质同量,产能大幅提高,晶体坯料易加工,加工成本低,且长晶能耗低,成本可大大降低。

    Grows multiple high quality sheets simultaneously, significantly increases volume of production, the power can be easily prepared with low cost, low power consumption on growing process, reduce the growing cost significantly。

    4、  设备及热场稳定性好,重复性高,主要热场部件可使用2年以上。

    High stability of equipment and hot zone, high repeatability, main hot zone parts have life cycle of more than two years.

    5、  采用触摸屏,PAC全自动操作系统,人性化的人机对话系统,操作简便。

    Touch screen, PAC automatic operation system, uniquely designed human-machine communication system, easy to use。

    6、  拥有研发基地,可验证长晶,为客户提供专业的技术培训、设备操作和工艺指导。

    Own R&D center to test crystal growing, providing our clients with professional training on technique, operation and process.

    7、  规模化的研发基地,可同时进行技术验证与创新,确保产品与技术的成熟性和前沿性,持续将公司最新研发成果快速与客户共享。

    Large scale R&D center enables continuous technical validation and innovation, ensure the product and technology is mature and stay cutting-edge, and to share the latest research and development with our clients.

    8、  配置真空安全保护装置,安全性能更高。

    Equipped with vacuum safety protection device, increases safety level。

    9、  精密稳定的提拉系统,专利设计,控制精度高,传动平稳,抗干扰能力强,更利于晶体生长。

     

    Precise and stable pulling system, patent design, high precision control, better anti-interference ability, to ensure better growing process.

    性能参数Specification:

    类型 Type

    导模法 EFG

    炉体

    Chamber

    800×1300mm

    冷态空炉极限真空度

    Ultimate vacuum under cold furnace condition

    ≤6.6×10-4Pa

    籽晶杆

    Seed Rod

    炉内行程

    Internal Stroke

    1000mm

    提拉速度连续可调范围/精度

    Adjustable range/precision of pulling speed

    0.1-50mm/h±1%

    快提拉速度连续升降可调

    Adjustable lifting range of fast pulling speed

    100-150mm/min

    真空配置

    Vacuum system

    分子泵、机械泵、插板阀

    Molecular pump, mechanical pump, gate valve

    真空测量系统

    Vacuum measuring system

    测量范围:大气压到1×10-5Pa

    Measuring range: Atmosphere1×10-5Pa

    自动控制系统

    Automatic control system

    PAC全自动运行程序

    PAC automatic operating program

    循环水用量

    Circulation water usage

    ≥8 m3/h

    额定总功率/频率

    Rated power/frequency

    80kw/2500Hz

    设备占地面积(长×宽×高)

    Floor space (L×W×H)

    2200×1200×4000mm3 

     

    技术指标:Technical parameter:

    项目Subject

    指标Parameter

    最大使用功率

    Max working power

    30kw

    长晶周期

    Cycle of growth

    70H

    单炉能耗

    Power consumption

    1200kw。H

    晶片规格

    Substrate specification

    双片,多片(16-24片),异形件(管、棒、拱形件等);也可根据客户要求定制规格。

    投料量

    Charge amount

    5-6kg或可连续加料

    5-6kg & can be added continuously

    取材率

    Sample drawing rate

    ≥80%

    成本

    Cost

    ¥600/kg

     

     

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